rus
Competent opinion
D.Shamiryan
Russian MEMS production of European quality The transfer of modern high technologies to Russia is one of the priority tasks, the solution of which largely determines the future of the country. Unfortunately, there are few successful examples of such projects in the semiconductor industry. Therefore, the project to create a factory of the Mapper Lithography (Netherlands) in the Technopolis Moscow is very interesting and important. Since 2014 it has started serial production of MEMS. Denis Shamiryan, General Director of Mapper LLC, explains about the prospects of the company’s development.
Russian MEMS production of European quality The transfer of modern high technologies to Russia is one of the priority tasks, the solution of which largely determines the future of the country. Unfortunately, there are few successful examples of such projects in the semiconductor industry. Therefore, the project to create a factory of the Mapper Lithography (Netherlands) in the Technopolis Moscow is very interesting and important. Since 2014 it has started serial production of MEMS. Denis Shamiryan, General Director of Mapper LLC, explains about the prospects of the company’s development.
L.Peter
New classics of photolithography In the conditions of ongoing sanctions confrontation, Russian enterprises and research organizations are forced to adjust approaches to the selection of equipment. In particular, it is necessary to take into account both the risks of refusal to supply equipment, as well as possible problems with their subsequent repair and modernization. As a result, manufacturers from countries that did not impose economic sanctions against Russia have additional advantages. One of the companies that joined the number of unwitting "beneficiaries" of the political situation is MIDAS System Co., Ltd. from South Korea. Founded in 1998 in Daejeon, MIDAS develops and manufactures photolithography equipment: mask aligners, as well as spin coaters. In the homeland of the company, its solutions are used by such giants of the semiconductor industry as Samsung and LG, as well as by leading scientific centers working in the field of microelectronics and nanotechnology. In Russia, the equipment of this brand is supplied by the MINATEH and is also in high demand. At the end of May, at the SEMIEXPO Russia exhibition, we were given the opportunity to find out the details about solutions offered by MIDAS "from the first hand" – from the Director of the Sales division, Lee Peter.
New classics of photolithography In the conditions of ongoing sanctions confrontation, Russian enterprises and research organizations are forced to adjust approaches to the selection of equipment. In particular, it is necessary to take into account both the risks of refusal to supply equipment, as well as possible problems with their subsequent repair and modernization. As a result, manufacturers from countries that did not impose economic sanctions against Russia have additional advantages. One of the companies that joined the number of unwitting "beneficiaries" of the political situation is MIDAS System Co., Ltd. from South Korea. Founded in 1998 in Daejeon, MIDAS develops and manufactures photolithography equipment: mask aligners, as well as spin coaters. In the homeland of the company, its solutions are used by such giants of the semiconductor industry as Samsung and LG, as well as by leading scientific centers working in the field of microelectronics and nanotechnology. In Russia, the equipment of this brand is supplied by the MINATEH and is also in high demand. At the end of May, at the SEMIEXPO Russia exhibition, we were given the opportunity to find out the details about solutions offered by MIDAS "from the first hand" – from the Director of the Sales division, Lee Peter.
Nanotechnology
S.Udovichenko, A.Pisarev, A.Busygin, O.Maevsky
Neuroprocessor based on combined memristor-diode crossbar The paper presents the concept of an autonomous hardware – a neuroprocessor, on which both neural networks with simple neurons used in information technologies and a biomorphic neural network can be based for modeling the work of the cortical column of the human brain. Neuroprocessor as a computational device of matrix-vector operations includes logical and memory matrices based on a combined memristor-diode crossbar. We present a functional diagram of a neuroprocessor, electrical circuits of a storage matrix and a universal logical matrix. The latter as a programmable logical matrix performs matrix-vector multiplication by successive conjunctions with inversion; as a switch directs the output pulses of neurons to the synapses of other neurons; as part of the input device of the neuroprocessor implements the primary processing of the signal in the digital mode by multiplying the matrix by a vector, converting the input data into the desired format; as part of the output device, compresses the information with the same multiplication for transmission to the interface unit. SPICE-simulation of the main nodes of the neuroprocessor showed high energy efficiency of the proposed matrices.
Neuroprocessor based on combined memristor-diode crossbar The paper presents the concept of an autonomous hardware – a neuroprocessor, on which both neural networks with simple neurons used in information technologies and a biomorphic neural network can be based for modeling the work of the cortical column of the human brain. Neuroprocessor as a computational device of matrix-vector operations includes logical and memory matrices based on a combined memristor-diode crossbar. We present a functional diagram of a neuroprocessor, electrical circuits of a storage matrix and a universal logical matrix. The latter as a programmable logical matrix performs matrix-vector multiplication by successive conjunctions with inversion; as a switch directs the output pulses of neurons to the synapses of other neurons; as part of the input device of the neuroprocessor implements the primary processing of the signal in the digital mode by multiplying the matrix by a vector, converting the input data into the desired format; as part of the output device, compresses the information with the same multiplication for transmission to the interface unit. SPICE-simulation of the main nodes of the neuroprocessor showed high energy efficiency of the proposed matrices.
Tags: memories and logical matrices memristor-diode crossbar multiplication of a matrix by a vector neuroprocessor processing and routing of signals запоминающая и логическая матрицы мемристорно-диодный кроссбар нейропроцессор обработка и коммутация сигналов умножение матрицы на вектор
A.Grigoriev, A.Ivanov, V.Ilyin, V.Luchinin
Vacuum electronics: renaissance or stagnation The developments in the millimeter wavelengths and the terahertz frequency range, as well as the need to ensure high values of the most important quality factor of wireless communication systems, radar and radio electronic countermeasures – product of output power, operating frequency and frequency band – have become a stimulus for the development of vacuum microelectronics. The use of basic and modified processes of micro- and nanotechnology and of infrastructure of integrated production of solid-state electronics and microsystem equipment create prerequisites for the evolution of vacuum electronics into the micro- and nanoscale region. The paper notes that in terms of a complex of parameters, including speed, quality factor, limiting operating frequency, noise level, resistance to radiation, temperature and electromagnetic influences, vacuum electronics devices can exceed solid-state functional analogues. The actual physical and technological problems of vacuum microelectronics are determined. At the Department of Radio Electronics and at the Center for Microtechnology and Diagnostics of ETU "LETI", modern developments are being realized, including field emission cathodes based on silicon carbide and diamond, a millimeter range traveling-wave tube for 5G wireless communication systems and millimeter-wave klystrons. Also, the paper considers areas in which vacuum microelectronics may be in demand.
Vacuum electronics: renaissance or stagnation The developments in the millimeter wavelengths and the terahertz frequency range, as well as the need to ensure high values of the most important quality factor of wireless communication systems, radar and radio electronic countermeasures – product of output power, operating frequency and frequency band – have become a stimulus for the development of vacuum microelectronics. The use of basic and modified processes of micro- and nanotechnology and of infrastructure of integrated production of solid-state electronics and microsystem equipment create prerequisites for the evolution of vacuum electronics into the micro- and nanoscale region. The paper notes that in terms of a complex of parameters, including speed, quality factor, limiting operating frequency, noise level, resistance to radiation, temperature and electromagnetic influences, vacuum electronics devices can exceed solid-state functional analogues. The actual physical and technological problems of vacuum microelectronics are determined. At the Department of Radio Electronics and at the Center for Microtechnology and Diagnostics of ETU "LETI", modern developments are being realized, including field emission cathodes based on silicon carbide and diamond, a millimeter range traveling-wave tube for 5G wireless communication systems and millimeter-wave klystrons. Also, the paper considers areas in which vacuum microelectronics may be in demand.
Tags: field emission cathode klystron traveling wave tube vacuum micro-device автоэмиссионный катод вакуумный микроприбор клистрон лампа бегущей волны
B.Gribov, К.Zinoviev, О.Kalashnik, N.Gerasimenko, D.Smirnov, V.Sukhanov, L.Sukhanova, V.Chetverikov
Obtaining hydrogen for fuel cells using finely dispersed silicon The development of hydrogen energy causes the growth of interest in the creation of chemical hydrogen generators. The paper considers the prospect of using fine-dispersed silicon in such generators. In particular, the waste products of the production of high-purity single-crystal and polycrystalline silicon, as well as metallurgical silicon, can be suitable and cheap materials for the obtaining of hydrogen when interacting with a weak-alkaline KOH solution. The study of the change in the rate and the thermal effect of the reaction as a function of its time, the parameters of the silicon powder, and the ratio of the initial components of the solution made it possible to establish that for an identical particle size of the powder, the specific rate of hydrogen generation depends little on the method of obtaining silicon, its crystal structure and the impurity content. The main factor influencing the intensity of the chemical reaction is the particle size of the powder. Based on the research, recommendations for the selection of powders of polycrystalline and monocrystalline silicon for practical use in autonomous chemical hydrogen generators are proposed.
Obtaining hydrogen for fuel cells using finely dispersed silicon The development of hydrogen energy causes the growth of interest in the creation of chemical hydrogen generators. The paper considers the prospect of using fine-dispersed silicon in such generators. In particular, the waste products of the production of high-purity single-crystal and polycrystalline silicon, as well as metallurgical silicon, can be suitable and cheap materials for the obtaining of hydrogen when interacting with a weak-alkaline KOH solution. The study of the change in the rate and the thermal effect of the reaction as a function of its time, the parameters of the silicon powder, and the ratio of the initial components of the solution made it possible to establish that for an identical particle size of the powder, the specific rate of hydrogen generation depends little on the method of obtaining silicon, its crystal structure and the impurity content. The main factor influencing the intensity of the chemical reaction is the particle size of the powder. Based on the research, recommendations for the selection of powders of polycrystalline and monocrystalline silicon for practical use in autonomous chemical hydrogen generators are proposed.
Tags: chemical hydrogen generator hydrogen energy monocrystalline and polycrystalline silicon водородная энергетика монокристаллический и поликристаллический кремний химический генератор водорода
Test & Measurement
N.Izrailev, A.Kazachkov, I.Rod, A.Isachenko, D.Shamiryan
Interprocess control of critical dimensions in production of MEMS The paper presents the results of the development of the script for the analysis of optical images. Using Deriche’s boundary delimitation algorithm, the analysis script allows obtaining critical dimensions (CD) of micro-sized structures captured by an automated optical system. The monitoring of the geometrical parameters of the MEMS products after various technological processes helps to control the processes’ performance which is strictly required by the quality management system maintained in the MEMS manufacturing. The developed technique allows to determine with a high accuracy the critical dimensions of chips located on a silicon or glass wafer. A complete optical inspection of one 100 mm wafer together with image processing takes less than 10 minutes. Although the developed script is designed to control the parameters of wafers of certain types and sizes, the algorithms used allow for a significant expansion of its functionality in the future.
Interprocess control of critical dimensions in production of MEMS The paper presents the results of the development of the script for the analysis of optical images. Using Deriche’s boundary delimitation algorithm, the analysis script allows obtaining critical dimensions (CD) of micro-sized structures captured by an automated optical system. The monitoring of the geometrical parameters of the MEMS products after various technological processes helps to control the processes’ performance which is strictly required by the quality management system maintained in the MEMS manufacturing. The developed technique allows to determine with a high accuracy the critical dimensions of chips located on a silicon or glass wafer. A complete optical inspection of one 100 mm wafer together with image processing takes less than 10 minutes. Although the developed script is designed to control the parameters of wafers of certain types and sizes, the algorithms used allow for a significant expansion of its functionality in the future.
Tags: image processing microstructure optical inspection quality management микроструктуры обработка изображений оптическая инспекция управление качеством
A.Filonov, I.Yaminsky, A.Akhmetova, G.Meshkov
FemtoScan Online! Why? The FemtoScan Online software allows to process, analyze and create images in scanning probe microscopy, as well as to operate a scanning probe microscope, including remotely via the Internet. FemtoScan Online perceives more than 100 different formats of data developed by both existing and already disappeared companies, microscopes of which are used in laboratories around the world. The software is convenient for analyzing large images, because two images are displayed: an overview with a "sliding" area and an increased detailed view of the content of the "sliding" area. Also in FemtoScan Online you can view 3D images on a stereo monitor. The software is successfully used in educational work in universities, secondary schools and in the Nanotechnology youth innovation creativity center.
FemtoScan Online! Why? The FemtoScan Online software allows to process, analyze and create images in scanning probe microscopy, as well as to operate a scanning probe microscope, including remotely via the Internet. FemtoScan Online perceives more than 100 different formats of data developed by both existing and already disappeared companies, microscopes of which are used in laboratories around the world. The software is convenient for analyzing large images, because two images are displayed: an overview with a "sliding" area and an increased detailed view of the content of the "sliding" area. Also in FemtoScan Online you can view 3D images on a stereo monitor. The software is successfully used in educational work in universities, secondary schools and in the Nanotechnology youth innovation creativity center.
Tags: electron microscopy image processing and analysis optical microscopy scanning probe microscopy обработка и анализ изображений оптическая микроскопия сканирующая зондовая микроскопия электронная микроскопия
Conferences, Exhibitions, Seminars
Compact laser-interferometric complex (CLIC) – promising research in field of gravitational physics
Under the aegis of the Nanotechnological Society of Russia (NSR) with the assistance of the Russian Academy of Sciences and the Academy of Sciences of the Republic of Tatarstan, a scientific and technical seminar "Creation of a compact laser-interferometric complex based on the principle of gravitationally induced frequency shift" was held in Kazan on June 14, 2018. The initiators of the seminar and keynote speakers were the participants of the temporary creative team (TCT), created in 2014 under the leadership of B.Pavlov. TCT has become a continuer of scientific and applied research, conducted in Kazan by the scientific center of gravity-wave research Dulkyn. The work of the seminar was led by the chairman of the program committee, academician of the Russian Academy of Sciences S.N.Bagaev (Institute of Laser Physics, SB RAS).
Infrastructure
Reportage from laboratory
D.Georgiev
Supercritical fluid technologies – basis for creating innovative implants Supercritical fluid technologies are an important area of innovative developments at the intersection of chemistry, physics and medicine, which allow replacing traditional solutions that use toxic and fire hazardous chemicals. The combination of efficiency and harmlessness for the environment causes the ever increasing use of supercritical fluids for separation and purification of substances, as well as for the formation and processing of complex materials, including micronisation and nano-dispersion. The sphere of application of supercritical fluid technologies covers petrochemical, food industry, perfumery, pharmaceuticals and other industries. One of the most striking examples of the technological breakthrough that was achieved through the introduction of supercritical fluid technologies is the production of implantable medical devices at Cardioplant in Penza.
Supercritical fluid technologies – basis for creating innovative implants Supercritical fluid technologies are an important area of innovative developments at the intersection of chemistry, physics and medicine, which allow replacing traditional solutions that use toxic and fire hazardous chemicals. The combination of efficiency and harmlessness for the environment causes the ever increasing use of supercritical fluids for separation and purification of substances, as well as for the formation and processing of complex materials, including micronisation and nano-dispersion. The sphere of application of supercritical fluid technologies covers petrochemical, food industry, perfumery, pharmaceuticals and other industries. One of the most striking examples of the technological breakthrough that was achieved through the introduction of supercritical fluid technologies is the production of implantable medical devices at Cardioplant in Penza.