DOI: https://doi.org/10.22184/1993-8578.2023.16.7-8.434.442

The equipment for instrumental nanoindentation traditionally represents a product containing a displacement sensor and a force-generating element operating in the nanoscale range of displacements and forces. At the same time, all working elements of the nanoindenter have a system of elastic attachment to a rigid body. However, part of the force generated by the actuator is spent on the deformation of the suspension system of the movable elements. This paper considers the design of a nanohardometer, in which a force cell is introduced that allows measuring the real value of the indentation force without the need to take into account the deformation losses of the elastic elements of the nanohardometer. Such modification of the product, according to the authors, allows to significantly increase the accuracy of measuring the mechanical properties of soft materials and thin coatings.