rus
Issue #3-4/2024
G.Kh.Sultanova, A.А.Prakash, E.V.Gladkikh, A.A.Rusakov, N.V.Kornilov, A.S.Useinov
A METHOD FOR STUDYING THE MUTUAL ORIENTATION OF PLATE SURFACES MADE OF OPTICALLY TRANSPARENT MATERIALS
A METHOD FOR STUDYING THE MUTUAL ORIENTATION OF PLATE SURFACES MADE OF OPTICALLY TRANSPARENT MATERIALS
DOI: https://doi.org/10.22184/1993-8578.2024.17.3-4.200.206
This paper describes a device for express measurement of plate tilt angles and angles between faces of plates transparent in the visible range in the visible radiation range. The range of values of angles, which can be measured by this setup, is calculated. Measurements and calculations of reflection coefficients of samples from silicon, sapphire, quartz and polymethyl methacrylate, the surfaces of which have different roughness, allowed us to formulate a restriction on the quality of the surface under study: the rms roughness should not exceed 50 nm.
Subscribe to the journal Nanoindustry to read the full article.
This paper describes a device for express measurement of plate tilt angles and angles between faces of plates transparent in the visible range in the visible radiation range. The range of values of angles, which can be measured by this setup, is calculated. Measurements and calculations of reflection coefficients of samples from silicon, sapphire, quartz and polymethyl methacrylate, the surfaces of which have different roughness, allowed us to formulate a restriction on the quality of the surface under study: the rms roughness should not exceed 50 nm.
Subscribe to the journal Nanoindustry to read the full article.
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