DEVELOPMENT OF MICROMECHANICAL LINEAR ACCELERATION SENSORS AND THEIR SERIAL INDUSTRIAL ENGINEERING
In SRC RF FSUE "Central Research Institute of Chemistry and Mechanics" has been developed a line of micromechanical linear acceleration sensors. The line includes sensors of three versions MMA-2, MMA-10 and MMA-30 with conversion ranges of ±20 m/s2, ±100 m/s2 and ±300 m/s2 respectively. The sensors are intended for use as part of orientation, stabilisation and navigation systems in various products. The full range of tests confirming the declared technical characteristics and resistance to external influences has been carried out, and the operating design documentation for serial industrial engineering has been approved. The planned production value of these sensors is several thousand pieces per year.
Tags: accelerometer capacitive sensor mems sensor calibration sensor packaging sensor test акселерометр емкостной датчик испытания датчиков калибровка датчиков мэмс сборка датчиков
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