Vacuum technology, cryogenics and nanotechnology
are the three pillars on which the world of high technology is based. The subjects of IX International Conference, which is held in 2014 in Moscow, are fully
in line with this motto
are the three pillars on which the world of high technology is based. The subjects of IX International Conference, which is held in 2014 in Moscow, are fully
in line with this motto
Теги: carbon films nanofluidics nanostructures vacuum equipment вакуумное оборудование наноструктуры нанофлюидика углеродные пленки
The conference materials included 68 reports of 189 authors representing 56 organisations from 19 cities in six countries. In the context of the subjects of the Nanoindustry journal let us focus on the reports given in the section "Nanotechnology and biotechnology".
The report of A.Belyanin and his co-authors (CNITI Tekhnomash Research Institute) considered the conditions for the creation of carbon films using glow discharge. The composition and structure of the carbon films were studied by the methods of electron microscopy, Raman spectroscopy (RS), IR spectroscopy and X-ray diffraction. Shown is the effect of thermal treatment on the structure of carbon films..
The unique physical and chemical properties of the various carbon phases, crystal (graphene, diamond etc.) and non-crystalline regular (graphite, fullerene and the like) provide the basis for the use of such materials in electronic equipment. The greatest prospects are associated with carbon-based films in microelectronics to generate radiation resistant semiconductor devices, high-temperature electronics, integrated circuits with the ultrahigh-density of elements; ultrahigh-speed integrated circuits and flat panel displays. Tens of carbon films generation methods are currently used. The carbon films, which are mainly formed by the plate shapes of graphite crystallites, are considered the most technologically advanced, for example, when creating field-emission cathodes. Such films are generally multi-phase and contain both the crystalline and X-ray amorphous phases.
During research on silicon substrates by glow discharge multi-phase carbon films consisting of the X-ray amorphous and crystalline phases were generated. It is found that films formed by larger crystallites get closer to polycrystalline systems by their properties, and films formed by small clusters get close to X-ray amorphous ones. It is noted that the proportions of the various types of clusters and their associations, as well as crystallites in the film depending on the production conditions, can vary significantly. By varying the synthesis conditions, it is possible to change the phase composition and structure of the phases of carbon films measured by X-ray diffraction, IR and Raman spectra. Functional properties largely depend on the composition and morphology of the carbon films. The conditions for changing the phase concentrations are due to the fact that the formation of carbon films by plasma methods the sub-cluster structure occurs (unlike the sub-atomic growth of single crystals). Using Raman spectroscopy makes it possible to control the functional properties of the X-ray amorphous carbon films, which determine the performance of devices based thereon.
The report of A.Belyanin, V.Borisov and M.Samoylovich was devoted to the impact from thermal treatment on the structure of the carbon films and the current-voltage characteristics of field emission cathodes based thereon. An objective of the emission electronics is to reduce the emission barrier from the cathode surface. Field emission means a significant reduction (up to 1-10 V/µm) of the electric-field strength required for the emergence of the field emission of electrons. Prospects have the improved characteristics of the emission-electronic devices associated with the development of layered non-glowing (field emission) cathodes based on carbon materials including the crystalline and non-crystalline ordered carbon phases. The speakers pointed to the relationship between the conditions for the creation (synthesis and subsequent annealing) of various films of carbon materials and the characteristics of field emission cathodes based thereon. Using Raman spectroscopy makes it possible to carry out non-destructive testing of the carbon films and diagnose degradation of performance of the emitting carbon layers of such cathodes.
V.Elinson et al (the Tsiolkovsky Moscow State Aviation Technological University MATI) presented the results of research into antimicrobial activity of polyethylenterephtalate with a nanostructured surface with respect to clinical strains of microorganisms. An assessment of the quantitative microbial growth data after exposure to various polymer samples showed that the antimicrobial effect is dependent on the exposure time cultures of strains with polymeric films and the polymer surface modification conditions. As a result of the conducted research a confirmation of the statistically significant antimicrobial activity of modified polymers with respect to a number of pathogens of nosocomial infections was obtained. The research will be continued in relation to both the spreading of polymers with different functionalities and a more detailed examination of the effect of nanomaterials generated in different conditions on microorganisms. This will make it possible to develop new medical products, modify existing ones, and actively fight hospital infections.
The report of S.Fedorov and his colleagues provided an insight into the patterns of formation of the near-surface layer on the metal ceramic modified under the microalloying conditions with a low-energy and high-current electron beam. It has been established that in most cases the destruction of the surface-substrate system starts with the plastic deformation of the substrate near the interface, when the system is subjected to loading. The combined treatment of surface with successive application of two layered composite manufacturing techniques makes it possible to change the state of stress in the surface layer of a tool. The resulting new material of the composite type is characterised by a combination of high physical and chemical properties of the surface layer and the required properties of the base.
L.Kravets and colleagues noted that in the last decade significantly the interest in creating a device for nanofluidics, the research area that studies the behaviour, methods of monitoring and control of fluid motion in nanometer-sized channels has increased. Such devices are in demand where the items under research may be taken in very small quantities, e.g. in Coulter counters, the analytical separation and determination of biomolecules such as proteins and DNA. Logic devices, which are used for the targeted delivery of ions, i.e. nanofluidic diodes, field transistors and bipolar transistors, are considered to be the most promising area of application of nanofluidic devices. At the present stage one of the main objectives in nanofluidics is to create a technology to obtain nanochannels and search for the necessary materials.
The developed method to create composite membranes with the conductivity asymmetry based on polymers synthesised in plasma is unique and effective because it is only it that makes it possible to create a layer, the thickness of which can be easily controlled by changing the parameters of the discharge and plasma exposure time, on the track membrane surface. Variation of the initial membrane material and monomers for creating a polymer layer on the surface and also the possibility of modifying it by doping or photooxidation in the case of conductive polymers allows obtaining a large variety of composite diode-like membranes with a wide range of characteristics.
N.Tatarinova and N.Gavrilov from the National Research Nuclear University MEPhI through experiments established the deterioration of dielectric strength of the vacuum gap subject to various types of inclusions and films on the surface of electrodes. Existing hypothesis cannot explain the observed characteristics of the prebreak-down conductivity of the vacuum gap. It is proposed to consider the interface between the metal inclusions in the form of pores, the processes in which support the Townsend discharge in the vacuum gap.
A group of researchers from the Moscow State University of Medicine and Dentistry, the Russian Dentistry company and the Vekshinsky Research Institute of Vacuum Technology developed a new silicon carbide coating to protect dentures from biodegradation. Currently the prosthetic dentistry is faced an acute issue of protection from destruction by microorganisms of the bases of removable dentures made of polymeric materials. An experimental study of the protective properties of silicon carbide Pantsir (Carapace) put on Ftoraks plastic samples showed it was possible to protect polymeric materials from microorganisms, in particular, staphylococci. This coating is 100% safe for humans.
A team of researchers from the Bauman Moscow State Technical University (Bauman MSTU) led by Yu.Panfilov presented the nanotech laboratory vacuum equipment designed to educate students and conduct research by graduate students enrolled in the specialty 210100 "Electronics and Nanoelectronics" and 152200 "Nanoengineering". The Department has the process and analytical equipment, i.e. a small-size modular vacuum system, a particle-beam vacuum system, a vacuum unit for the application of nanostructured hardening coatings, a scanning probe microscope Solver Next, an acousto-optic spectrophotometer and a picoammeter.
N.Smolanov with colleagues from the Ogarev Mordovia State University researched into the elemental, granulometric and phase composition of the particles obtained from the low-temperature arc-discharge plasma during spraying of titanium cathode in a vacuum chamber. The dependence of the mass fraction of particles on sizes in the range of 20-180 microns was established. It was shown that the powders obtained by the low-temperature deposition of metal plasma, for most traits exhibit properties typical of nanocrystalline materials. Based on the studies of the structure and properties of the materials deposited along the plasma flow (condensate around the cathode, thin films on a substrate, dust structures on the walls of the vacuum chamber) the paper examined the possible mechanisms of evolution of the plasma from the cathode spot before its recombination on the substrate and walls of the vacuum chamber under the conditions of application of the electric and magnetic fields.
V.Elinson, A.Lyamin (the Tsiolkovsky Moscow State Aviation Technological University MATI) and L.Kravets (Flerov Laboratory of Nuclear Reactions) presented the study of physical and chemical characteristics of the surface of polyethylenterephtalate track membranes (PET TM) with a nanostructured surface, in particular, the surface topology, and the parameters of the relief and surface energy, as well as its antimicrobial properties with respect to museum strains of organism. The studies have established that when the surface is nanostructured with PET TM and a-C:H film applied (creating a nanocomposite material on the surface), the ion-plasma treatment impacts mainly the PET TM surface significantly influencing the inner diameter of the tracks without changing their symmetry. This increases the life of the track membranes, for example in water purification, and impedes biofilm formation on the surface thereof, wherein microorganisms separated from water are concentrated. Nanostructured PET TM can be characterised by antimicrobial activity with respect to gram-positive and gram-negative microorganisms and opportunistic fungi. The antimicrobial activity concerning gram-positive organisms and fungi fits by size in the dependence of the total surface energy and its dispersive component on the thickness of a-C:H film, and for gram-positive microorganisms, it can also be recorded when the film thickness is up to 100 nm. The antimicrobial dependence of PET TM with respect to gram-negative microorganisms can be recorded with less time of nanostructuring than for PET.
Researchers from the Volga State University of Technology under the guidance of N.Sushentsov presented the project of creating a comprehensive automated vacuum system combining magnetron sputtering and arc evaporation methods to create multi-component films of nanocrystalline structure for various purposes with a given stoichiometric composition and properties. On the one hand, the versatility of the developed system is determined by a huge number of possible combinations of individual components in the formed film coating and thus a large number of variations of such coatings, on the other hand, it is determined by an integration of the various methods of coating in the same process cycle. In addition, the system makes it possible to make films in the automated mode with a wide range of process designs thus facilitating the process optimisation.
V.Sleptsov (the Tsiolkovsky Moscow State Aviation Technological University MATI) presented a process facility for application of a metal coating on the rolled superporous materials. The purpose of the technology is to create superporous layers of valve metals that are used as electrode materials, and create a dielectric layer with high dielectric capacitivity and breakdown voltage. Creation of a superporous nanostructured layer of valve metals (Al, Ti, Ta etc.) stably retaining their own parameters in the operation of electrolytic capacitors is achieved by vapour deposition of metal on the roll carrier (aluminium foil, polymer etc.) in the medium of the active and inert gases at an average vacuum (10-2 – 10-3 Torr). The technology was tested in the serial production of electrolytic capacitors at the factory "Cation" (Khmelnytsky) and at the pilot production facilities of the Vekshinsky Research Institute of Vacuum Technology.
X international exhibition "Vacuumexpo-2015" and the conference "Vacuum equipment, materials and technology" will be held on 14-16 April 2015. ■
The report of A.Belyanin and his co-authors (CNITI Tekhnomash Research Institute) considered the conditions for the creation of carbon films using glow discharge. The composition and structure of the carbon films were studied by the methods of electron microscopy, Raman spectroscopy (RS), IR spectroscopy and X-ray diffraction. Shown is the effect of thermal treatment on the structure of carbon films..
The unique physical and chemical properties of the various carbon phases, crystal (graphene, diamond etc.) and non-crystalline regular (graphite, fullerene and the like) provide the basis for the use of such materials in electronic equipment. The greatest prospects are associated with carbon-based films in microelectronics to generate radiation resistant semiconductor devices, high-temperature electronics, integrated circuits with the ultrahigh-density of elements; ultrahigh-speed integrated circuits and flat panel displays. Tens of carbon films generation methods are currently used. The carbon films, which are mainly formed by the plate shapes of graphite crystallites, are considered the most technologically advanced, for example, when creating field-emission cathodes. Such films are generally multi-phase and contain both the crystalline and X-ray amorphous phases.
During research on silicon substrates by glow discharge multi-phase carbon films consisting of the X-ray amorphous and crystalline phases were generated. It is found that films formed by larger crystallites get closer to polycrystalline systems by their properties, and films formed by small clusters get close to X-ray amorphous ones. It is noted that the proportions of the various types of clusters and their associations, as well as crystallites in the film depending on the production conditions, can vary significantly. By varying the synthesis conditions, it is possible to change the phase composition and structure of the phases of carbon films measured by X-ray diffraction, IR and Raman spectra. Functional properties largely depend on the composition and morphology of the carbon films. The conditions for changing the phase concentrations are due to the fact that the formation of carbon films by plasma methods the sub-cluster structure occurs (unlike the sub-atomic growth of single crystals). Using Raman spectroscopy makes it possible to control the functional properties of the X-ray amorphous carbon films, which determine the performance of devices based thereon.
The report of A.Belyanin, V.Borisov and M.Samoylovich was devoted to the impact from thermal treatment on the structure of the carbon films and the current-voltage characteristics of field emission cathodes based thereon. An objective of the emission electronics is to reduce the emission barrier from the cathode surface. Field emission means a significant reduction (up to 1-10 V/µm) of the electric-field strength required for the emergence of the field emission of electrons. Prospects have the improved characteristics of the emission-electronic devices associated with the development of layered non-glowing (field emission) cathodes based on carbon materials including the crystalline and non-crystalline ordered carbon phases. The speakers pointed to the relationship between the conditions for the creation (synthesis and subsequent annealing) of various films of carbon materials and the characteristics of field emission cathodes based thereon. Using Raman spectroscopy makes it possible to carry out non-destructive testing of the carbon films and diagnose degradation of performance of the emitting carbon layers of such cathodes.
V.Elinson et al (the Tsiolkovsky Moscow State Aviation Technological University MATI) presented the results of research into antimicrobial activity of polyethylenterephtalate with a nanostructured surface with respect to clinical strains of microorganisms. An assessment of the quantitative microbial growth data after exposure to various polymer samples showed that the antimicrobial effect is dependent on the exposure time cultures of strains with polymeric films and the polymer surface modification conditions. As a result of the conducted research a confirmation of the statistically significant antimicrobial activity of modified polymers with respect to a number of pathogens of nosocomial infections was obtained. The research will be continued in relation to both the spreading of polymers with different functionalities and a more detailed examination of the effect of nanomaterials generated in different conditions on microorganisms. This will make it possible to develop new medical products, modify existing ones, and actively fight hospital infections.
The report of S.Fedorov and his colleagues provided an insight into the patterns of formation of the near-surface layer on the metal ceramic modified under the microalloying conditions with a low-energy and high-current electron beam. It has been established that in most cases the destruction of the surface-substrate system starts with the plastic deformation of the substrate near the interface, when the system is subjected to loading. The combined treatment of surface with successive application of two layered composite manufacturing techniques makes it possible to change the state of stress in the surface layer of a tool. The resulting new material of the composite type is characterised by a combination of high physical and chemical properties of the surface layer and the required properties of the base.
L.Kravets and colleagues noted that in the last decade significantly the interest in creating a device for nanofluidics, the research area that studies the behaviour, methods of monitoring and control of fluid motion in nanometer-sized channels has increased. Such devices are in demand where the items under research may be taken in very small quantities, e.g. in Coulter counters, the analytical separation and determination of biomolecules such as proteins and DNA. Logic devices, which are used for the targeted delivery of ions, i.e. nanofluidic diodes, field transistors and bipolar transistors, are considered to be the most promising area of application of nanofluidic devices. At the present stage one of the main objectives in nanofluidics is to create a technology to obtain nanochannels and search for the necessary materials.
The developed method to create composite membranes with the conductivity asymmetry based on polymers synthesised in plasma is unique and effective because it is only it that makes it possible to create a layer, the thickness of which can be easily controlled by changing the parameters of the discharge and plasma exposure time, on the track membrane surface. Variation of the initial membrane material and monomers for creating a polymer layer on the surface and also the possibility of modifying it by doping or photooxidation in the case of conductive polymers allows obtaining a large variety of composite diode-like membranes with a wide range of characteristics.
N.Tatarinova and N.Gavrilov from the National Research Nuclear University MEPhI through experiments established the deterioration of dielectric strength of the vacuum gap subject to various types of inclusions and films on the surface of electrodes. Existing hypothesis cannot explain the observed characteristics of the prebreak-down conductivity of the vacuum gap. It is proposed to consider the interface between the metal inclusions in the form of pores, the processes in which support the Townsend discharge in the vacuum gap.
A group of researchers from the Moscow State University of Medicine and Dentistry, the Russian Dentistry company and the Vekshinsky Research Institute of Vacuum Technology developed a new silicon carbide coating to protect dentures from biodegradation. Currently the prosthetic dentistry is faced an acute issue of protection from destruction by microorganisms of the bases of removable dentures made of polymeric materials. An experimental study of the protective properties of silicon carbide Pantsir (Carapace) put on Ftoraks plastic samples showed it was possible to protect polymeric materials from microorganisms, in particular, staphylococci. This coating is 100% safe for humans.
A team of researchers from the Bauman Moscow State Technical University (Bauman MSTU) led by Yu.Panfilov presented the nanotech laboratory vacuum equipment designed to educate students and conduct research by graduate students enrolled in the specialty 210100 "Electronics and Nanoelectronics" and 152200 "Nanoengineering". The Department has the process and analytical equipment, i.e. a small-size modular vacuum system, a particle-beam vacuum system, a vacuum unit for the application of nanostructured hardening coatings, a scanning probe microscope Solver Next, an acousto-optic spectrophotometer and a picoammeter.
N.Smolanov with colleagues from the Ogarev Mordovia State University researched into the elemental, granulometric and phase composition of the particles obtained from the low-temperature arc-discharge plasma during spraying of titanium cathode in a vacuum chamber. The dependence of the mass fraction of particles on sizes in the range of 20-180 microns was established. It was shown that the powders obtained by the low-temperature deposition of metal plasma, for most traits exhibit properties typical of nanocrystalline materials. Based on the studies of the structure and properties of the materials deposited along the plasma flow (condensate around the cathode, thin films on a substrate, dust structures on the walls of the vacuum chamber) the paper examined the possible mechanisms of evolution of the plasma from the cathode spot before its recombination on the substrate and walls of the vacuum chamber under the conditions of application of the electric and magnetic fields.
V.Elinson, A.Lyamin (the Tsiolkovsky Moscow State Aviation Technological University MATI) and L.Kravets (Flerov Laboratory of Nuclear Reactions) presented the study of physical and chemical characteristics of the surface of polyethylenterephtalate track membranes (PET TM) with a nanostructured surface, in particular, the surface topology, and the parameters of the relief and surface energy, as well as its antimicrobial properties with respect to museum strains of organism. The studies have established that when the surface is nanostructured with PET TM and a-C:H film applied (creating a nanocomposite material on the surface), the ion-plasma treatment impacts mainly the PET TM surface significantly influencing the inner diameter of the tracks without changing their symmetry. This increases the life of the track membranes, for example in water purification, and impedes biofilm formation on the surface thereof, wherein microorganisms separated from water are concentrated. Nanostructured PET TM can be characterised by antimicrobial activity with respect to gram-positive and gram-negative microorganisms and opportunistic fungi. The antimicrobial activity concerning gram-positive organisms and fungi fits by size in the dependence of the total surface energy and its dispersive component on the thickness of a-C:H film, and for gram-positive microorganisms, it can also be recorded when the film thickness is up to 100 nm. The antimicrobial dependence of PET TM with respect to gram-negative microorganisms can be recorded with less time of nanostructuring than for PET.
Researchers from the Volga State University of Technology under the guidance of N.Sushentsov presented the project of creating a comprehensive automated vacuum system combining magnetron sputtering and arc evaporation methods to create multi-component films of nanocrystalline structure for various purposes with a given stoichiometric composition and properties. On the one hand, the versatility of the developed system is determined by a huge number of possible combinations of individual components in the formed film coating and thus a large number of variations of such coatings, on the other hand, it is determined by an integration of the various methods of coating in the same process cycle. In addition, the system makes it possible to make films in the automated mode with a wide range of process designs thus facilitating the process optimisation.
V.Sleptsov (the Tsiolkovsky Moscow State Aviation Technological University MATI) presented a process facility for application of a metal coating on the rolled superporous materials. The purpose of the technology is to create superporous layers of valve metals that are used as electrode materials, and create a dielectric layer with high dielectric capacitivity and breakdown voltage. Creation of a superporous nanostructured layer of valve metals (Al, Ti, Ta etc.) stably retaining their own parameters in the operation of electrolytic capacitors is achieved by vapour deposition of metal on the roll carrier (aluminium foil, polymer etc.) in the medium of the active and inert gases at an average vacuum (10-2 – 10-3 Torr). The technology was tested in the serial production of electrolytic capacitors at the factory "Cation" (Khmelnytsky) and at the pilot production facilities of the Vekshinsky Research Institute of Vacuum Technology.
X international exhibition "Vacuumexpo-2015" and the conference "Vacuum equipment, materials and technology" will be held on 14-16 April 2015. ■
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