The paper analyses the problems encountered in the production of thin-film hybrid integrated circuits (TF HIC) and compares production technologies, using the contact photolithography method and laser exposure, as well as different ways of forming thin films. A comprehensive solution for modernizing TF HIC production has been found.
The paper analyses the problems encountered in the production of thin-film hybrid integrated circuits (TF HIC) and compares production technologies, using the contact photolithography method and laser exposure, as well as different ways of forming thin films. A comprehensive solution for modernizing TF HIC production has been found.
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