rus
Issue #5/2019
L.Asinovski, D.Nikulin, V.Vasiljev
Film thickness determination by spectroscopic reflectometry method using Fourier fast transform algorithms
Film thickness determination by spectroscopic reflectometry method using Fourier fast transform algorithms
This paper presents examples of the software package intended to spectra treatment in order to determine thickness of films. Practical usage of TFCompanion (Semiconsoft) software as part of the MProbe® (Semiconsoft) measuring systems for reflected spectra’s analysis and thin films’ thickness calculation performed by embedded fast Fourier transform (FFT) algorithms is observed.
This paper presents examples of the software package intended to spectra treatment in order to determine thickness of films. Practical usage of TFCompanion (Semiconsoft) software as part of the MProbe® (Semiconsoft) measuring systems for reflected spectra’s analysis and thin films’ thickness calculation performed by embedded fast Fourier transform (FFT) algorithms is observed.
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