rus
Special Issue/2019
S. S. Generalov, V. V. Amelichev, I. V. Godovitsyn, S. A. Polomoshnov, S. V. Nikiforov, D. M. Grigoryev, A. V. Il’kov
Microsystems for transforming acoustic pressure
Microsystems for transforming acoustic pressure
The paper presents the results of development and research on capacitive type acoustic pressure transducers (APT), as well as the main principal specifications of APT capacitor and membranous modules.
The paper presents the results of development and research on capacitive type acoustic pressure transducers (APT), as well as the main principal specifications of APT capacitor and membranous modules.
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