rus
Special Issue/2019
N. V. Volkov N. I. Kargin A. S. Timoshenkov
Features of FIB technology application for MEMS nano elements fabrication
Features of FIB technology application for MEMS nano elements fabrication
The paper considers the possibility of using ion raster microscopy (FIB-Focused Ion Beam) as a processing system for the creation of elements of microelectronic mechanical systems (MEMS) on silicon substrates with characteristic dimensions of less than 1 µm.
The paper considers the possibility of using ion raster microscopy (FIB-Focused Ion Beam) as a processing system for the creation of elements of microelectronic mechanical systems (MEMS) on silicon substrates with characteristic dimensions of less than 1 µm.
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