rus
Special Issue/2019
V. F. Tupikin Yu. V. Gerasimenko A. S. Ermakova N. V. Komarov V. N. Komarov A. I. Sergienko
Technological features of technochemical wafer processing in technological process of manufacturing MEMS and microassemblies and promising design solutions for their implementation
Technological features of technochemical wafer processing in technological process of manufacturing MEMS and microassemblies and promising design solutions for their implementation
The paper considers features of bulk and surface chemical processing of plates and the formation of a photoresist mask in the creation of MEMS. The requirements for technological equipment have been determined. The design solutions of special technological equipment for manufacturing MEMS have been presented.
The paper considers features of bulk and surface chemical processing of plates and the formation of a photoresist mask in the creation of MEMS. The requirements for technological equipment have been determined. The design solutions of special technological equipment for manufacturing MEMS have been presented.
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