rus
Special Issue/2019
I. M. Malay V. P. Timoshenkov A. M. Rulev
On the necessity of creating microwave power measurement tools based on MEMS technology
On the necessity of creating microwave power measurement tools based on MEMS technology
The paper highlights the necessity of creating microwave power measurement tools based on microelectromechanical systems technology. Besides, it considers methodical steps for research to identify options for designing a microwave power sensor, as well as prospects for manufacturing experimental samples.
The paper highlights the necessity of creating microwave power measurement tools based on microelectromechanical systems technology. Besides, it considers methodical steps for research to identify options for designing a microwave power sensor, as well as prospects for manufacturing experimental samples.
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