rus
TS_pub
technospheramag
technospheramag
ТЕХНОСФЕРА_РИЦ
Special Issue/2019
A. N. Boyko L. R. Boev S. P. Timoshenkov A. V. Brykin
Studying activation process of TiV getter films
Studying activation process of TiV getter films
The paper presents the results of studying thermal activation influence on the elemental composition of Ti-V getter films. It has been shown that heating of the samples is accompanied by diffusion of oxygen deep into the solid and decrease in oxygen surface concentration. The results of the work can be used to create getters based on Ti-V alloy.
The paper presents the results of studying thermal activation influence on the elemental composition of Ti-V getter films. It has been shown that heating of the samples is accompanied by diffusion of oxygen deep into the solid and decrease in oxygen surface concentration. The results of the work can be used to create getters based on Ti-V alloy.
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