Special Issue/2019
V. I. Plebanovich S. M. Avakaw
Microdefect inspection tools as necessary system technology constituent
Microdefect inspection tools as necessary system technology constituent
Can you imagine how much harm can be done by defects in the course of IC fabrication? Some experts do not pay enough attention and lose resources. However, there is an answer to this challenge called Automatic Defect Inspection Tools and this is exactly what contemporary IC production process needs for defect-free IC fabrication.
Can you imagine how much harm can be done by defects in the course of IC fabrication? Some experts do not pay enough attention and lose resources. However, there is an answer to this challenge called Automatic Defect Inspection Tools and this is exactly what contemporary IC production process needs for defect-free IC fabrication.
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