rus
Special Issue/2019
Yu. V. Gerasimenko V. F. Tupikin A. S. Ermakova N. V. Komarov V. N. Komarov A. I. Sergienko
Promising directions of developing specialized domestic equipment for wafer technochemical processing in technological process of manufacturing microcircuits, MEMS and microassemblies
Promising directions of developing specialized domestic equipment for wafer technochemical processing in technological process of manufacturing microcircuits, MEMS and microassemblies
The paper presents a complex review of the specialized equipment for the wafers techno-chemical processing, as well as considers the main world trends in the production of special technological equipment for manufacturing integrated circuits, MEMS and microassemblies, summing up the experience of Scientific Research Institute of Semiconductor Mechanical Engineering in this field.
The paper presents a complex review of the specialized equipment for the wafers techno-chemical processing, as well as considers the main world trends in the production of special technological equipment for manufacturing integrated circuits, MEMS and microassemblies, summing up the experience of Scientific Research Institute of Semiconductor Mechanical Engineering in this field.
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