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DOI: 10.22184/1993-8578.2021.14.2.142.149
A simplified model of the magnetron discharge is proposed with the output of semi-empirical formulas that allow, knowing or calculating the distribution of the magnetic field over the target surface using the ELCUT software for calculating fields, to predict the shape of the MSS target erosion. A calculation program called Pretarger based on MATLAB has been developed. It is necessary to run the program to compare the predicted erosion with the developed targets for various magnetrons.
A simplified model of the magnetron discharge is proposed with the output of semi-empirical formulas that allow, knowing or calculating the distribution of the magnetic field over the target surface using the ELCUT software for calculating fields, to predict the shape of the MSS target erosion. A calculation program called Pretarger based on MATLAB has been developed. It is necessary to run the program to compare the predicted erosion with the developed targets for various magnetrons.
Теги: magnetic system of the magnetron magnetron discharge magnetron sputtering system target erosion магнетронная распылительная система магнетронный разряд магнитная система магнетрона эрозия мишени
PREDICTION OF TARGET EROSION OF PLANAR MSS
A.G.Kolesnikov1, Head of the laboratory, Dubna, Russia, N.V.Gorbunov2, Cand. of Sci. (Technical), Dubna, Russia, Leading Researcher, Yu.A.Kryukov1, Vice-rector, Dubna, Russia
DOI: 10.22184/1993-8578.2021.14.2.142.149
Получено: 25.02.2021 г.
A simplified model of the magnetron discharge is proposed with the output of semi-empirical formulas that allow, knowing or calculating the distribution of the magnetic field over the target surface using the ELCUT software for calculating fields, to predict the shape of the MSS target erosion. A calculation program called Pretarger based on MATLAB has been developed. It is necessary to run the program to compare the predicted erosion with the developed targets for various magnetrons.
A.G.Kolesnikov1, Head of the laboratory, Dubna, Russia, N.V.Gorbunov2, Cand. of Sci. (Technical), Dubna, Russia, Leading Researcher, Yu.A.Kryukov1, Vice-rector, Dubna, Russia
DOI: 10.22184/1993-8578.2021.14.2.142.149
Получено: 25.02.2021 г.
A simplified model of the magnetron discharge is proposed with the output of semi-empirical formulas that allow, knowing or calculating the distribution of the magnetic field over the target surface using the ELCUT software for calculating fields, to predict the shape of the MSS target erosion. A calculation program called Pretarger based on MATLAB has been developed. It is necessary to run the program to compare the predicted erosion with the developed targets for various magnetrons.
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